Fixing method of planar target material

The invention discloses a method for fixing a planar target, and aims to shorten the time consumed for fixing the planar target and improve the processing efficiency, the technical scheme is as follows: the method for fixing the planar target comprises the following steps: S1, placing a vacuum chuck...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	LEI YONGJIE, YU FANG, PEI WEIYANG, LIU YIHUA, LIN HAO, TAN JIJUN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING METALLURGY PERFORMING OPERATIONS POLISHING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention discloses a method for fixing a planar target, and aims to shorten the time consumed for fixing the planar target and improve the processing efficiency, the technical scheme is as follows: the method for fixing the planar target comprises the following steps: S1, placing a vacuum chuck on an electromagnetic chuck, and starting the electromagnetic chuck to adsorb the vacuum chuck, so that the bottom surface of the vacuum chuck is attached to the electromagnetic chuck; s2, the plane target material is placed on the top face of a vacuum suction cup, a vacuum pump is started, the plane target material is adsorbed and fixed through the vacuum suction cup, and the two adjacent side edges of the plane target material are parallel to the X axis and the Y axis of an electromagnetic suction cup respectively; and S3, air cylinders are placed on electromagnetic chucks, the bottoms of the air cylinders are attached to the electromagnetic chucks, piston rods of the air cylinders are arranged on the tops of th