Easily-released ultrathin flexible neural electrode array and preparation method thereof
The invention discloses an easy-to-release ultrathin flexible neural electrode array and a preparation method thereof, spin-coated sodium polystyrenesulfonate (PSS) is used as a release sacrificial layer, and the PSS is easier to separate from a substrate when a device is released by using the stron...
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| creator | KANG XIAOYANG WANG AIPING LIU LUSHENG ZHANG JING WANG JUNKONGSHUAI |
| description | The invention discloses an easy-to-release ultrathin flexible neural electrode array and a preparation method thereof, spin-coated sodium polystyrenesulfonate (PSS) is used as a release sacrificial layer, and the PSS is easier to separate from a substrate when a device is released by using the strong hydrophilicity of the PSS. Harmful reagents such as strong acid and strong alkali are not involved in the release process. The method is compatible with the traditional micro-nano processing technology before the release operation, and comprises the processing steps of compatible photoetching, etching, deposition and the like. By adding the release material in the specific area, the release time of the ultrathin flexible electrode can be greatly shortened, and the integrity of the flexible electrode is protected. The method is easy and convenient to operate, and ultrathin flexible neural electrode arrays of different sizes can be easily released.
本发明公开了一种易释放的超薄柔性神经电极阵列及其制备方法，本发明利用旋涂的聚苯乙烯磺酸钠PSS作为释放牺牲层，利用PSS的强亲水性，在 |
| format | Patent |
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本发明公开了一种易释放的超薄柔性神经电极阵列及其制备方法，本发明利用旋涂的聚苯乙烯磺酸钠PSS作为释放牺牲层，利用PSS的强亲水性，在</description><language>chi ; eng</language><subject>DIAGNOSIS ; HUMAN NECESSITIES ; HYGIENE ; IDENTIFICATION ; MEDICAL OR VETERINARY SCIENCE ; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES ; MICROSTRUCTURAL TECHNOLOGY ; PERFORMING OPERATIONS ; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS ; SURGERY ; TRANSPORTING</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220617&DB=EPODOC&CC=CN&NR=114634151A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220617&DB=EPODOC&CC=CN&NR=114634151A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KANG XIAOYANG</creatorcontrib><creatorcontrib>WANG AIPING</creatorcontrib><creatorcontrib>LIU LUSHENG</creatorcontrib><creatorcontrib>ZHANG JING</creatorcontrib><creatorcontrib>WANG JUNKONGSHUAI</creatorcontrib><title>Easily-released ultrathin flexible neural electrode array and preparation method thereof</title><description>The invention discloses an easy-to-release ultrathin flexible neural electrode array and a preparation method thereof, spin-coated sodium polystyrenesulfonate (PSS) is used as a release sacrificial layer, and the PSS is easier to separate from a substrate when a device is released by using the strong hydrophilicity of the PSS. Harmful reagents such as strong acid and strong alkali are not involved in the release process. The method is compatible with the traditional micro-nano processing technology before the release operation, and comprises the processing steps of compatible photoetching, etching, deposition and the like. By adding the release material in the specific area, the release time of the ultrathin flexible electrode can be greatly shortened, and the integrity of the flexible electrode is protected. The method is easy and convenient to operate, and ultrathin flexible neural electrode arrays of different sizes can be easily released.
本发明公开了一种易释放的超薄柔性神经电极阵列及其制备方法，本发明利用旋涂的聚苯乙烯磺酸钠PSS作为释放牺牲层，利用PSS的强亲水性，在</description><subject>DIAGNOSIS</subject><subject>HUMAN NECESSITIES</subject><subject>HYGIENE</subject><subject>IDENTIFICATION</subject><subject>MEDICAL OR VETERINARY SCIENCE</subject><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</subject><subject>MICROSTRUCTURAL TECHNOLOGY</subject><subject>PERFORMING OPERATIONS</subject><subject>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</subject><subject>SURGERY</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNyrEOgjAQBmAWB6O-w_kADA3obgjGycnBjZz0b2hyts21JPL2MvgATt_ybatnz9nLUisEnGFplqJcJh_ICT7-JaCAWVloHWPRaEGsygtxsJQUidfvY6A3yhQtlQmK6PbVxrFkHH7uquO1f3S3GikOyIlHBJShuxvTnpvWnMyl-ed8Af5sOvU</recordid><startdate>20220617</startdate><enddate>20220617</enddate><creator>KANG XIAOYANG</creator><creator>WANG AIPING</creator><creator>LIU LUSHENG</creator><creator>ZHANG JING</creator><creator>WANG JUNKONGSHUAI</creator><scope>EVB</scope></search><sort><creationdate>20220617</creationdate><title>Easily-released ultrathin flexible neural electrode array and preparation method thereof</title><author>KANG XIAOYANG ; WANG AIPING ; LIU LUSHENG ; ZHANG JING ; WANG JUNKONGSHUAI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN114634151A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2022</creationdate><topic>DIAGNOSIS</topic><topic>HUMAN NECESSITIES</topic><topic>HYGIENE</topic><topic>IDENTIFICATION</topic><topic>MEDICAL OR VETERINARY SCIENCE</topic><topic>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</topic><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>PERFORMING OPERATIONS</topic><topic>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</topic><topic>SURGERY</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>KANG XIAOYANG</creatorcontrib><creatorcontrib>WANG AIPING</creatorcontrib><creatorcontrib>LIU LUSHENG</creatorcontrib><creatorcontrib>ZHANG JING</creatorcontrib><creatorcontrib>WANG JUNKONGSHUAI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KANG XIAOYANG</au><au>WANG AIPING</au><au>LIU LUSHENG</au><au>ZHANG JING</au><au>WANG JUNKONGSHUAI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Easily-released ultrathin flexible neural electrode array and preparation method thereof</title><date>2022-06-17</date><risdate>2022</risdate><abstract>The invention discloses an easy-to-release ultrathin flexible neural electrode array and a preparation method thereof, spin-coated sodium polystyrenesulfonate (PSS) is used as a release sacrificial layer, and the PSS is easier to separate from a substrate when a device is released by using the strong hydrophilicity of the PSS. Harmful reagents such as strong acid and strong alkali are not involved in the release process. The method is compatible with the traditional micro-nano processing technology before the release operation, and comprises the processing steps of compatible photoetching, etching, deposition and the like. By adding the release material in the specific area, the release time of the ultrathin flexible electrode can be greatly shortened, and the integrity of the flexible electrode is protected. The method is easy and convenient to operate, and ultrathin flexible neural electrode arrays of different sizes can be easily released.
本发明公开了一种易释放的超薄柔性神经电极阵列及其制备方法，本发明利用旋涂的聚苯乙烯磺酸钠PSS作为释放牺牲层，利用PSS的强亲水性，在</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | DIAGNOSIS HUMAN NECESSITIES HYGIENE IDENTIFICATION MEDICAL OR VETERINARY SCIENCE MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SURGERY TRANSPORTING |
| title | Easily-released ultrathin flexible neural electrode array and preparation method thereof |
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