Easily-released ultrathin flexible neural electrode array and preparation method thereof

The invention discloses an easy-to-release ultrathin flexible neural electrode array and a preparation method thereof, spin-coated sodium polystyrenesulfonate (PSS) is used as a release sacrificial layer, and the PSS is easier to separate from a substrate when a device is released by using the strong hydrophilicity of the PSS. Harmful reagents such as strong acid and strong alkali are not involved in the release process. The method is compatible with the traditional micro-nano processing technology before the release operation, and comprises the processing steps of compatible photoetching, etching, deposition and the like. By adding the release material in the specific area, the release time of the ultrathin flexible electrode can be greatly shortened, and the integrity of the flexible electrode is protected. The method is easy and convenient to operate, and ultrathin flexible neural electrode arrays of different sizes can be easily released. 本发明公开了一种易释放的超薄柔性神经电极阵列及其制备方法，本发明利用旋涂的聚苯乙烯磺酸钠PSS作为释放牺牲层，利用PSS的强亲水性，在