Systems, apparatus, and methods for high quality ion beam formation

Embodiments of systems, apparatuses, and methods related to beam systems. An example beam system includes a charged particle source configured to generate a charged particle beam; a pre-accelerator system configured to accelerate the light beam; and an accelerator configured to accelerate the light beam from the pre-accelerator system. The pre-accelerator system may cause the light beam to converge as it propagates from the source to the input aperture of the accelerator. The pre-accelerator system may further reduce or eliminate source interference or damage caused by backflow traveling from the accelerator toward the source. 与光束系统有关的系统、设备和方法的实施例。一种示例光束系统，包括：带电粒子源，其被配置为产生带电粒子束；预加速器系统，其被配置为加速光束；以及加速器，其被配置为加速来自预加速器系统的光束。预加速器系统可以使得光束在它从源传播到加速器的输入孔径时会聚。预加速器系统可以进一步减少或消除由从加速器朝向源行进的回流引起的源干扰或损坏。