Wafer transmission device

The invention provides a wafer transmission device, which comprises a supporting shaft, a connecting piece and a manipulator group, and is characterized in that the connecting piece is movably connected with the supporting shaft, and the connecting piece rotates and ascends and descends along the supporting shaft; the manipulator group comprises two manipulators, the two manipulators are respectively connected with the connecting piece, the two manipulators are respectively positioned at the upper end and the lower end of the supporting shaft and are distributed in a mirror image manner, and the two manipulators in the manipulator group are combined with the operation of the connecting piece to respectively pick and place wafers in the same cavity. According to the wafer transmission device, the manipulators can work in parallel, so that the wafer transmission efficiency can be greatly improved; according to the wafer transmission device provided by the invention, the mechanical arm groups are distributed in