Screen printing screen and manufacturing method thereof

The invention relates to the technical field of semiconductor device manufacturing, and provides a silk-screen printing screen and a manufacturing method thereof. The silk-screen printing screen comprises a composite screen which comprises a rigid layer and an elastic layer which are arranged in a stacked mode, and the elastic layer and the rigid layer are jointly provided with a printing pattern groove in a penetrating mode; the frame is arranged on the side wall of the composite screen in a surrounding manner and is connected with the side wall of the composite screen. The silk-screen printing screen plate has high patterning precision, meanwhile, abrasion of printed objects can be avoided, and cost is lower. 本发明涉及半导体器件制造技术领域，提供一种丝网印刷网板及其制作方法。丝网印刷网板包括：复合网版，包括层叠设置的刚性层和弹性层，弹性层和刚性层共同贯穿开设有印刷图形槽；边框，包围设置于复合网版的侧壁且与复合网版的侧壁连接。本发明的丝网印刷网板具有较高的图形化精度，同时可避免印物的磨损，且具有更低的成本。