DETERMINING PROCESS FOR MANUFACTURING SEMICONDUCTOR

Methods, systems, and computer programs are presented that use machine learning (ML) to determine a process for manufacturing a semiconductor to accelerate definition of the process. One general aspect includes a method including operations for performing experiments for processing components, each experiment being controlled by a process of a set of processes identifying parameters for manufacturing an apparatus. The method also includes performing virtual simulations to process operations of the component, each simulation being controlled by one of the set of processes. An ML algorithm is trained by using the experimental results and virtual results from the virtual simulation to obtain an ML model. The method also includes receiving a specification for the desired processing of the component, and creating, by the ML model, an operation for processing a new process of the component according to the specification. 提出了使用机器学习(ML)来确定用于制造半导体的制程以加速制程的定义的方法、系统和计算机程序。一个一般方面包括一种方法，该方法包括用于执行用于处理部件的实验的操作，每个实验由识别用于制造设备