Illumination device for proximity exposure device, LED unit, proximity exposure device, and exposure method for proximity exposure device

Provided is a lighting device capable of independently using both a mercury lamp and an LED as a light source unit. The lighting device is provided with: a first light source unit (30) that uses a mercury lamp (31) as a light source; a fly-eye lens (46) that uniformly emits light from the first light source unit (30); a plurality of reflectors (40, 41, 50, 51) that respectively reflect light from the first light source unit (30); and an LED unit (60) having a second light source section (61) having a plurality of LED elements (62) as light sources, and a movement mechanism (70) for moving the second light source section (61) between an operating position (AP) located on the optical path (EL) of the first light source section (30) and a retracted position (WP) separated from the optical path (EL) of the first light source section (30). 提供一种能够独立地使用水银灯和LED这两者作为光源部的照明装置。该照明装置具备：以水银灯(31)为光源的第一光源部(30)；使来自该第一光源部(30)的光均匀地射出的复眼透镜(46)；分别反射来自第一光源部(30)的光的多个反射镜(40、41、50、51)；以及LED单元(60)，具有将多个LED元件(62)作为光源的第二光源部(61)和移动机构(70