Piezoelectric driving multi-degree-of-freedom optical space positioning device, method and system

The invention provides a piezoelectric driving multi-degree-of-freedom optical space positioning device, method and system. The piezoelectric driving multi-degree-of-freedom optical space positioning device comprises a lifting mechanism platform, a three-dimensional rotary table and an optical assem...

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Hauptverfasser:	JIA AONAN, MAO JIANWEI, YIN YONGKANG, ZHANG YONGTAO, ZHOU CHUNHUA, XIONG LIANGLEI, YE ZILONG, SHEN JUNFENG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CONTROLLING INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS REGULATING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES TESTING
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Beschreibung
Zusammenfassung:	The invention provides a piezoelectric driving multi-degree-of-freedom optical space positioning device, method and system. The piezoelectric driving multi-degree-of-freedom optical space positioning device comprises a lifting mechanism platform, a three-dimensional rotary table and an optical assembly. The three-dimensional rotary table is connected with the optical assembly; the lifting mechanism platform is connected with the three-dimensional turntable; the lifting mechanism platform comprises a guide rail and a lead screw; the lifting mechanism platform drives the three-dimensional rotary table to linearly move in the vertical direction through a lead screw. And the lifting mechanism platform provides rigid support for the piezoelectric driving multi-degree-of-freedom optical space positioning device. The device is wider in application range and higher in reliability, can truly simulate the spatial pose of the optical component, and can accurately obtain the thermal deformation performance of the optical