Flow rate control device, flow rate control method, and storage medium
The invention provides a flow rate ratio control device, a control method thereof, and a storage medium. The flow rate ratio control device includes: at least two branch flow paths branching from a main flow path; the first fluid control valve and the second fluid control valve are respectively arra...
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| Hauptverfasser: | , , |
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The invention provides a flow rate ratio control device, a control method thereof, and a storage medium. The flow rate ratio control device includes: at least two branch flow paths branching from a main flow path; the first fluid control valve and the second fluid control valve are respectively arranged on the two branch flow channels and are provided with position sensors; a storage unit that stores a reference position of the valve body that distributes the flow rate flowing through the main flow path to the first and second branch flow paths at a predetermined flow rate ratio; and a flow rate ratio control unit that controls the position of the first fluid control valve so that the valve body becomes a reference position, controls the flow rate of the second fluid control valve so that the flow rate becomes a target flow rate, controls the flow rate ratio of the at least two branch flow paths, and controls the flow rate ratio of the at least two branch flow paths when the position of the valve body of the |
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