Volume scattering defect detection equipment and method

The invention provides a volume scattering defect detection device and method, the device outputs a first detection light beam and a second detection light beam through an illumination system, the transmission directions of the first detection light beam and the second detection light beam are perpendicular to each other, and the light beam output surfaces are parallel to the surface of a target optical element, and the first detection light beam and the second detection light beam are incident into the target optical element; the method comprises the following steps of: intersecting at an area in a target optical element to form a body illumination area of which the thickness is consistent with the depth of field of a microscope lens, and imaging scattered light of the body illumination area through a microscopic imaging system to obtain a defect image of the target optical element so as to analyze body scattering defect distribution in the target optical element. According to the scheme, defects outside the