Hyperspectral system based on MEMS and spectrometer

The invention relates to a hyperspectral imaging technology, and discloses an MEMS-based hyperspectral system and spectrograph, the MEMS-based hyperspectral system comprises a light source (121), a light beam processing unit and MEMS scanning micromirrors (151), and the MEMS scanning micromirrors (1...

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Bibliographische Detailangaben
Hauptverfasser:	XUE YUAN, HAN ZHONGXU, LING MING, ZHAO RUIFAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING
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Beschreibung
Zusammenfassung:	The invention relates to a hyperspectral imaging technology, and discloses an MEMS-based hyperspectral system and spectrograph, the MEMS-based hyperspectral system comprises a light source (121), a light beam processing unit and MEMS scanning micromirrors (151), and the MEMS scanning micromirrors (151) are array type scanning micromirrors; light beams (142) of the light source (121), which are processed by the light beam processing unit, enter the MEMS scanning micromirror (151), and the light beams (142) are sequentially reflected by the MEMS scanning micromirror (151) as required; the interference system (160) comprises an MEMS translation micro-mirror (163), a light beam (142) reflected by the MEMS scanning micro-mirror (151) enters the MEMS translation micro-mirror (163), and the MEMS translation micro-mirror (163) modulates and reflects the light beam (142); the spectrometer designed by the invention is small in size, high in resolution, good in stability and low in cost. 本发明涉及高光谱成像技术，公开了基于MEMS的高光谱系统及光谱仪