Device and method for testing coated optical reflector
The embodiment of the invention discloses a device and method for testing a film-coated optical reflector, the device comprises an interferometer and a high-vacuum low-cold environment simulation cabin, the interferometer is used for testing the surface type of the film-coated optical reflector and...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The embodiment of the invention discloses a device and method for testing a film-coated optical reflector, the device comprises an interferometer and a high-vacuum low-cold environment simulation cabin, the interferometer is used for testing the surface type of the film-coated optical reflector and judging whether the film layer of the optical reflector is normal or not; and the high-vacuum low-cold environment simulation cabin is used for providing a test environment for the to-be-tested coated optical reflector. Therefore, the problem that the performance of the coated optical reflector under the high-vacuum and low-temperature conditions cannot be tested and verified at normal temperature is solved, and the method has a wide application prospect.
本发明的一个实施例公开了一种镀膜光学反射镜的测试装置及其方法,所述装置包括干涉仪和高真空低冷环境模拟舱,其中,所述干涉仪用于测试镀膜光学反射镜的面型并判断光学反射镜的膜层是否正常;所述高真空低冷环境模拟舱用于为待测镀膜光学反射镜提供测试环境。从而解决了无法在常温下测试无法验证镀膜光学反射镜在高真空低温情况下性能的问题,具有广泛的应用前景。 |
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