Drying system, method and equipment of spin dryer, storage medium and spin dryer

The invention relates to the field of semiconductor manufacturing, in particular to a drying system, method and equipment of a spin dryer, a storage medium and the spin dryer, and the drying system of the spin dryer comprises a spin dryer tube and further comprises a blowing mechanism used for feeding blowing gas; the heating mechanism is used for heating the purging gas and the spin dryer tube; the gas flow adjusting mechanism is used for adjusting the flow of the purging gas; the temperature and humidity sensor is used for measuring temperature information and humidity information in the spin dryer tube; the controller is used for acquiring temperature information and humidity information; when the humidity information is larger than a preset humidity threshold value and the temperature information is smaller than or equal to a preset temperature threshold value, the flow of purging gas in the purging mechanism is reduced; when the humidity information is larger than the preset humidity threshold value and