Water-cooled heat shield for increasing growth speed of monocrystalline silicon and device of water-cooled heat shield

The invention discloses a water-cooled heat shield for increasing the growth speed of monocrystalline silicon, relates to the technical field of monocrystalline silicon manufacturing, and can at least partially solve the problems that a water-cooled heat shield in the prior art is poor in heat radia...

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Hauptverfasser: LI FEIJIAN, YANG CHUNXIANG, ZHANG PENG, GONG XIAOLUN, LU JIANHUA, GUAN SHUJUN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a water-cooled heat shield for increasing the growth speed of monocrystalline silicon, relates to the technical field of monocrystalline silicon manufacturing, and can at least partially solve the problems that a water-cooled heat shield in the prior art is poor in heat radiation absorption capability and a monocrystalline silicon growth device is difficult to meet requirements. The water-cooled heat shield for increasing the growth speed of the monocrystalline silicon comprises a cylindrical water-cooled heat shield body, a bent circulating water channel is arranged in an interlayer of the water-cooled heat shield body, and a heat conduction structure located in the bent circulating water channel is arranged in the interlayer of the water-cooled heat shield body. The cylindrical cavity surface of the water-cooling heat shield body is a heat-conducting surface, the inner surface of the interlayer of the water-cooling heat shield body on the back of the heat-conducting surface is a heat