Single-side polishing machine for silicon carbide processing

The invention belongs to the technical field of silicon carbide processing, particularly relates to a single-sided polishing machine for silicon carbide processing, and aims to solve the technical problem that an existing silicon carbide polishing device cannot pre-process silicon carbide, and provi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LEE, JONG HAE, LU PEIFAN, PEI YOUSONG, XU HUAPING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention belongs to the technical field of silicon carbide processing, particularly relates to a single-sided polishing machine for silicon carbide processing, and aims to solve the technical problem that an existing silicon carbide polishing device cannot pre-process silicon carbide, and provides the following scheme that the single-sided polishing machine comprises a pre-processing box, a first mounting disc and a second mounting disc; the multiple first mounting discs are arranged on the side, close to the second mounting disc, of each first mounting disc, the output ends penetrate through the first mounting discs, the output ends are connected with an external power source between every two adjacent first mounting discs, and the output ends of the external power sources are connected with plasma generators. The end, away from the external power source, of the plasma generator is connected with a plasma spray head, and a plurality of connecting blocks are arranged on the opposite sides of every two ad