Substrate processing system and substrate processing method

The present invention provides a technique capable of reducing the number of discarded substrates even when an abnormality occurs in a processing unit. A substrate processing system according to one embodiment of the present invention comprises: a plurality of processing units capable of performing the same type of processing on a substrate; a transport device that transports the substrate to the plurality of processing units; and a control unit that controls the plurality of processing units and the conveying device. In addition, the control unit has a relief processing unit, a delivery processing unit, and a re-relief processing unit. The relief processing unit performs relief processing on the remaining substrate being processed in the abnormality processing unit in which the abnormality has occurred in the abnormality processing unit. The transport processing unit transports the remaining substrate from the abnormality processing unit to another processing unit based on a preset transport mode when the ab