Nanofluidic chip based on nanocracks and processing method thereof

The invention provides a nanofluidic chip based on nanocracks and a processing method thereof. The nano-fluidic chip is formed by bonding a polydimethylsiloxane channel layer and a glass substrate, the polydimethylsiloxane channel layer contains a micron channel and at least one nano channel, the na...

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Bibliographische Detailangaben
Hauptverfasser: SONG HANQIONG, SONG YONGXIN, PAN XINXIANG, LI DONGQING, PENG RAN, LI GANG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention provides a nanofluidic chip based on nanocracks and a processing method thereof. The nano-fluidic chip is formed by bonding a polydimethylsiloxane channel layer and a glass substrate, the polydimethylsiloxane channel layer contains a micron channel and at least one nano channel, the nano channel is connected with the micron channel, the tail end of the micron channel is connected with the outside through a liquid storage tank, and the liquid storage tank is used for adding and extracting a nano-fluidic chip sample. The processing method is simple, efficient and rapid processing of a single nano-channel array or a multi-nano-channel array can be achieved, and the length, the position and the size of the nano-channel are accurate and controllable. The problems of long time consumption, high cost, complex operation and the like of a traditional semiconductor processing technology are solved. The processed micro-nano fluidic chip can be used in the fields of biosensing, chemical analysis, micro-nano