Induction heating system of rotary silicon carbide crystal growth furnace and crystal growth furnace

The invention discloses an induction heating system of a rotary silicon carbide crystal growth furnace. The induction heating system comprises a spiral induction coil and a base for bearing the induction coil. The base comprises a rotary fixing seat and a rotary support covering the rotary fixing se...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LI HUI, SU WENFENG, MAO HONGYING, DING BAISONG, MAO RUICHUAN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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