Induction heating system of rotary silicon carbide crystal growth furnace and crystal growth furnace
The invention discloses an induction heating system of a rotary silicon carbide crystal growth furnace. The induction heating system comprises a spiral induction coil and a base for bearing the induction coil. The base comprises a rotary fixing seat and a rotary support covering the rotary fixing se...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses an induction heating system of a rotary silicon carbide crystal growth furnace. The induction heating system comprises a spiral induction coil and a base for bearing the induction coil. The base comprises a rotary fixing seat and a rotary support covering the rotary fixing seat; the induction coil is mounted on the rotary support, and the rotary support rotates to drive the induction coil to rotate along the central axis of the induction coil; the magnetic field distribution of the induction coil is controlled by regulating and controlling the rotation period and the rotation angle of the induction coil, so that the distribution of the temperature field is adjusted.
本发明公开了一种旋转碳化硅长晶炉感应加热系统,包括螺旋形的感应线圈、承载感应线圈的底座。所述底座包括旋转固定座及覆盖于旋转固定座上的旋转支座;所述感应线圈安装在旋转支座上,旋转支座旋转带动感应线圈沿感应线圈的中轴线旋转;通过调控感应线圈的旋转周期和旋转角度来控制感应线圈的磁场分布,从而调整温度场的分布。 |
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