Sealing inspection device and sealing inspection method
The present invention makes it possible to inspect more accurately and in a shorter time than in the prior art, and to inspect a seal using a simple configuration. A seal inspection device is provided with: a first jig (11) having a port (101) surrounded by an object to be inspected (20) and a throu...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The present invention makes it possible to inspect more accurately and in a shorter time than in the prior art, and to inspect a seal using a simple configuration. A seal inspection device is provided with: a first jig (11) having a port (101) surrounded by an object to be inspected (20) and a through-hole connected to an external leak detection flow path (104); a second jig (12) that sandwiches the inspection object (20) between the first jig (11) and the second jig (12); an inspection site sealing part (30) that, together with the first jig (11) and the second jig (12), sets a space in which the inspection target (20) is disposed as a closed space; a pressurization valve (111) that connects both a supply source for the inspection gas and an exhaust system to the port (101); a detector for inspecting the gas; a first measurement valve (121) that connects the probe to the port (101); and a second measurement valve (124) that connects the external leak detection flow path (104) and the probe.
能够以比以往高精度且短时间进行检查 |
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