Mask inspection apparatus and mask inspection method using same

The present invention relates to a mask inspection apparatus and a mask inspection method using the same. The mask inspection method includes: acquiring an image by capturing an image of a unit mask in which a plurality of openings are defined; setting a region adjacent to an edge of the unit mask i...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HWANG SANG DON, WOO JI-MIN, SONG YIHE, KWON MI-HYE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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