Methods of forming protective coatings on process chamber surfaces or components

Embodiments of the present disclosure provide methods of making or otherwise forming a protective coating comprising cerium oxide on a process chamber surface and/or component, such as a surface exposed to a plasma within a process chamber. In one or more embodiments, a method of forming a protectiv...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GORADIA, PRINA, SONTHEERIA, KADAM, ANKUR, BARIK, UJITA, BAJAJ, JITIKA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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