Device for controlling overflow of cleaning liquid drops and adjusting atmosphere
The invention discloses a device for controlling overflow of cleaning liquid drops and adjusting atmosphere, and relates to the technical field of single crystal cleaning, the device comprises a mounting base, a first spraying device, a second spraying device, a third spraying device, a clamping dev...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The invention discloses a device for controlling overflow of cleaning liquid drops and adjusting atmosphere, and relates to the technical field of single crystal cleaning, the device comprises a mounting base, a first spraying device, a second spraying device, a third spraying device, a clamping device and a waste liquid collecting mechanism, the mounting base is provided with the waste liquid collecting mechanism, the waste liquid collecting mechanism is provided with a mounting groove, and the mounting groove is provided with a clamping device; a mounting groove is formed in the mounting base, a placement mechanism is arranged in the mounting groove, a clamping device is arranged on the placement mechanism, a first spraying device and a second spraying device are arranged on the two sides of the waste liquid collecting mechanism respectively, a third spraying device is arranged at one end of the waste liquid collecting mechanism, and the first spraying device, the second spraying device and the third sprayi |
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