Wafer glue uniformizing equipment

The invention discloses wafer glue uniformizing equipment which comprises the components of a supporting member which is provided with three positioning groups, the three positioning groups are uniformly arranged at intervals along the circumferential direction of a first circumference, and each pos...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YE JINLIN, KUANG SHIYIN, GAO SICHENG
Format: Patent
Sprache:chi ; eng
Schlagworte:
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