Anti-reflection layer of PERC battery, manufacturing method of anti-reflection layer and battery

The invention is suitable for the technical field of solar cells, and provides an antireflection layer of a PERC cell, a manufacturing method of the antireflection layer and the cell. The antireflection layer of the PERC battery comprises a first silicon nitride film, a second silicon nitride film and a silicon oxide film which are sequentially arranged on the front surface of a silicon substrate of the PERC battery. Thus, due to the design of the three-layer structure of the first silicon nitride film, the second silicon nitride film and the silicon oxide film, the total thickness of the antireflection layer is small while a good antireflection effect can be achieved, and the influence of the antireflection layer on electrode contact can be reduced. Therefore, the photoelectric conversion efficiency of the PERC battery can be improved, no negative influence is generated on the reliability of the PERC battery, and large-scale production can be realized. 本申请适用于太阳能电池技术领域，提供了一种PERC电池的减反射层及其制作方法和电池。PERC电池的减反射层包括依