Photoresist supply equipment

The invention discloses photoresist supply equipment. The photoresist supply equipment comprises a bracket; the supporting piece is arranged in a conical shape and is arranged on the bracket; the inner diameter of the upper part is larger than that of the lower part; the pressing plate is positioned...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SHEN QILIANG, WAN YUANTAO, SHI FENG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses photoresist supply equipment. The photoresist supply equipment comprises a bracket; the supporting piece is arranged in a conical shape and is arranged on the bracket; the inner diameter of the upper part is larger than that of the lower part; the pressing plate is positioned above the supporting piece and is movably connected with the bracket; the adjusting mechanism is used for adjusting the distance between the pressing plate and the supporting piece; the box body is arranged in the supporting piece, and an opening in the box body is arranged downwards; the plunger is mounted in the opening of the box body; an air supply mechanism; the first end of the air inlet pipe is connected with the air supply mechanism, and the second end of the air inlet pipe penetrates through the plunger to be located in the box body and is close to the bottom of the box body. A sliding groove can be formed in the support, a sliding block can be arranged on the pressing plate, and the sliding block is in s