Electro-optical crystal film, preparation method and electronic component

The invention provides an electro-optical crystal film, a preparation method and an electronic component. The preparation method comprises the following steps: preparing a first mask on a film substrate; first ions are injected into the thin film substrate, and a first injection layer is formed in t...

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Bibliographische Detailangaben
Hauptverfasser:	LIAN KUN, LUO JUTING, ZHANG TAO, LIU JINPENG, ZHANG WENHUA, WANG JINCUI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTROGRAPHY FREQUENCY-CHANGING HOLOGRAPHY MATERIALS THEREFOR NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	The invention provides an electro-optical crystal film, a preparation method and an electronic component. The preparation method comprises the following steps: preparing a first mask on a film substrate; first ions are injected into the thin film substrate, and a first injection layer is formed in the thin film substrate; removing the first mask; preparing a second mask on the thin film substrate, wherein the pattern of the second mask is opposite to that of the first mask; second ions are injected into the thin film substrate, a second injection layer is formed in the thin film substrate, and the pattern of the second injection layer is the same as that of the first mask; removing the second mask; bonding the thin film substrate with a supporting substrate to obtain a bonded body; and carrying out heat treatment on the bonding body to separate the film substrate at the first injection layer and the second injection layer to obtain the electro-optical crystal film. The electro-optical crystal thin film with t