Conformal sharp-edge flat-top femtosecond laser shaping method and device for deep groove micromachining

The invention discloses a shape-preserving sharp-edge flat-top femtosecond laser shaping method and device for deep groove micromachining. The method comprises the following steps: expanding a Gaussian beam emitted by a laser by using a beam expander to obtain an expanded Gaussian beam; the expanded Gaussian beam is adjusted to be an ultra-high-level flat-topped beam through a beam smoothing device; carrying out apodization processing on the ultra-high-level flat-topped light beam by adopting a hard-edge diaphragm to obtain a rectangular flat-topped light beam; performing equal-proportion beam shrinkage imaging on the rectangular flat-topped light beam through a 4f optical system to obtain a target light spot; by means of the method, the problems that in femtosecond laser machining, the light beam focal depth is short, the light intensity at the top of a light spot is uneven, and a light spot boundary transition area is large can be effectively solved. 本发明公开了用于深槽微加工的保形锐边平顶飞秒激光整形方法与装置；其中方法包括：采用扩束器对激光器发出的高斯光束进行