Miniature weak charged particle beam detection device
The invention relates to a miniature weak charged particle beam detection device, and the device comprises an electron suppression electrode which is used for suppressing secondary electrons; the beam absorption electrode is used for absorbing the charged particle beam; the signal amplification elec...
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| creator | WANG YINTAO NIU BEN FU YUNQING YAO KE JIANG ZIHUAN LIU JIALIN HE ZHENCEN HUANG LIANGYU |
| description | The invention relates to a miniature weak charged particle beam detection device, and the device comprises an electron suppression electrode which is used for suppressing secondary electrons; the beam absorption electrode is used for absorbing the charged particle beam; the signal amplification electrode is used for generating secondary amplified electron flow; the signal absorption electrode is used for detecting and absorbing the total amplified current signal; the electron suppression electrode, the beam absorption electrode, the signal amplification electrode and the signal absorption electrode are sequentially arranged in the head-on charged beam direction, and the working environment of the detection device is a vacuum environment. Compared with the prior art, the method has the advantages of high detection precision, low production cost, easiness in processing and the like.
本发明涉及一种微型微弱带电粒子束流探测装置，包括：电子抑制极，用于抑制二次电子；束流吸收极，用于吸收带电粒子束流；信号放大极，用于产生二次放大的电子流；信号吸收极，用于探测吸收总的放大电流信号；电子抑制极、束流吸收极、信号放大极和信号吸收极分别为沿迎面带电束流 |
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本发明涉及一种微型微弱带电粒子束流探测装置，包括：电子抑制极，用于抑制二次电子；束流吸收极，用于吸收带电粒子束流；信号放大极，用于产生二次放大的电子流；信号吸收极，用于探测吸收总的放大电流信号；电子抑制极、束流吸收极、信号放大极和信号吸收极分别为沿迎面带电束流</description><language>chi ; eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY ; MEASUREMENT OF NUCLEAR OR X-RADIATION ; MEASURING ; PHYSICS ; TESTING</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220415&DB=EPODOC&CC=CN&NR=114355432A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220415&DB=EPODOC&CC=CN&NR=114355432A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>WANG YINTAO</creatorcontrib><creatorcontrib>NIU BEN</creatorcontrib><creatorcontrib>FU YUNQING</creatorcontrib><creatorcontrib>YAO KE</creatorcontrib><creatorcontrib>JIANG ZIHUAN</creatorcontrib><creatorcontrib>LIU JIALIN</creatorcontrib><creatorcontrib>HE ZHENCEN</creatorcontrib><creatorcontrib>HUANG LIANGYU</creatorcontrib><title>Miniature weak charged particle beam detection device</title><description>The invention relates to a miniature weak charged particle beam detection device, and the device comprises an electron suppression electrode which is used for suppressing secondary electrons; the beam absorption electrode is used for absorbing the charged particle beam; the signal amplification electrode is used for generating secondary amplified electron flow; the signal absorption electrode is used for detecting and absorbing the total amplified current signal; the electron suppression electrode, the beam absorption electrode, the signal amplification electrode and the signal absorption electrode are sequentially arranged in the head-on charged beam direction, and the working environment of the detection device is a vacuum environment. Compared with the prior art, the method has the advantages of high detection precision, low production cost, easiness in processing and the like.
本发明涉及一种微型微弱带电粒子束流探测装置，包括：电子抑制极，用于抑制二次电子；束流吸收极，用于吸收带电粒子束流；信号放大极，用于产生二次放大的电子流；信号吸收极，用于探测吸收总的放大电流信号；电子抑制极、束流吸收极、信号放大极和信号吸收极分别为沿迎面带电束流</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><subject>MEASUREMENT OF NUCLEAR OR X-RADIATION</subject><subject>MEASURING</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDD1zczLTCwpLUpVKE9NzFZIzkgsSk9NUShILCrJTM5JVUhKTcxVSEktSU0uyczPA7LKMpNTeRhY0xJzilN5oTQ3g6Kba4izh25qQX58anFBYnJqXmpJvLOfoaGJsampibGRozExagBfmC0Q</recordid><startdate>20220415</startdate><enddate>20220415</enddate><creator>WANG YINTAO</creator><creator>NIU BEN</creator><creator>FU YUNQING</creator><creator>YAO KE</creator><creator>JIANG ZIHUAN</creator><creator>LIU JIALIN</creator><creator>HE ZHENCEN</creator><creator>HUANG LIANGYU</creator><scope>EVB</scope></search><sort><creationdate>20220415</creationdate><title>Miniature weak charged particle beam detection device</title><author>WANG YINTAO ; NIU BEN ; FU YUNQING ; YAO KE ; JIANG ZIHUAN ; LIU JIALIN ; HE ZHENCEN ; HUANG LIANGYU</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN114355432A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2022</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><topic>MEASUREMENT OF NUCLEAR OR X-RADIATION</topic><topic>MEASURING</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>WANG YINTAO</creatorcontrib><creatorcontrib>NIU BEN</creatorcontrib><creatorcontrib>FU YUNQING</creatorcontrib><creatorcontrib>YAO KE</creatorcontrib><creatorcontrib>JIANG ZIHUAN</creatorcontrib><creatorcontrib>LIU JIALIN</creatorcontrib><creatorcontrib>HE ZHENCEN</creatorcontrib><creatorcontrib>HUANG LIANGYU</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>WANG YINTAO</au><au>NIU BEN</au><au>FU YUNQING</au><au>YAO KE</au><au>JIANG ZIHUAN</au><au>LIU JIALIN</au><au>HE ZHENCEN</au><au>HUANG LIANGYU</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Miniature weak charged particle beam detection device</title><date>2022-04-15</date><risdate>2022</risdate><abstract>The invention relates to a miniature weak charged particle beam detection device, and the device comprises an electron suppression electrode which is used for suppressing secondary electrons; the beam absorption electrode is used for absorbing the charged particle beam; the signal amplification electrode is used for generating secondary amplified electron flow; the signal absorption electrode is used for detecting and absorbing the total amplified current signal; the electron suppression electrode, the beam absorption electrode, the signal amplification electrode and the signal absorption electrode are sequentially arranged in the head-on charged beam direction, and the working environment of the detection device is a vacuum environment. Compared with the prior art, the method has the advantages of high detection precision, low production cost, easiness in processing and the like.
本发明涉及一种微型微弱带电粒子束流探测装置，包括：电子抑制极，用于抑制二次电子；束流吸收极，用于吸收带电粒子束流；信号放大极，用于产生二次放大的电子流；信号吸收极，用于探测吸收总的放大电流信号；电子抑制极、束流吸收极、信号放大极和信号吸收极分别为沿迎面带电束流</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY MEASUREMENT OF NUCLEAR OR X-RADIATION MEASURING PHYSICS TESTING |
| title | Miniature weak charged particle beam detection device |
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