Miniature weak charged particle beam detection device

The invention relates to a miniature weak charged particle beam detection device, and the device comprises an electron suppression electrode which is used for suppressing secondary electrons; the beam absorption electrode is used for absorbing the charged particle beam; the signal amplification electrode is used for generating secondary amplified electron flow; the signal absorption electrode is used for detecting and absorbing the total amplified current signal; the electron suppression electrode, the beam absorption electrode, the signal amplification electrode and the signal absorption electrode are sequentially arranged in the head-on charged beam direction, and the working environment of the detection device is a vacuum environment. Compared with the prior art, the method has the advantages of high detection precision, low production cost, easiness in processing and the like. 本发明涉及一种微型微弱带电粒子束流探测装置，包括：电子抑制极，用于抑制二次电子；束流吸收极，用于吸收带电粒子束流；信号放大极，用于产生二次放大的电子流；信号吸收极，用于探测吸收总的放大电流信号；电子抑制极、束流吸收极、信号放大极和信号吸收极分别为沿迎面带电束流