MEMS microphone and manufacturing method thereof

According to the MEMS microphone and the manufacturing method thereof provided by the invention, an anti-contact part is formed on the inner edge of an anchor area fixing part or the outer edge of a vibrating part of a vibrating diaphragm, and the anti-contact part comprises at least one of a limiting bulge, a limiting column and a limiting baffle plate; the problem that the vibration part of the vibrating diaphragm is clamped or overlapped with the anchor area fixing part during vibration can be effectively prevented, and the performance of the device is improved. 本发明提供了一种MEMS麦克风及其制造方法，在振膜的锚区固定部的内边缘或振动部的外边缘上形成防接触部，该防接触部包括限位凸起、限位柱和限位挡板中的至少一种，能够有效防止由于振膜的振动部在振动时与锚区固定部发生卡位或搭接的问题，提高器件性能。