Upper through cavity, lower through cavity and through cavity equipment

The invention discloses an upper penetrating cavity, a lower penetrating cavity and penetrating cavity equipment, the upper penetrating cavity is provided with an upper concave cavity formed by sinking downwards along the top end face of the upper penetrating cavity, and an upper pipeline penetrates through the upper concave cavity and extends into an inner cavity of the upper penetrating cavity; a gap is formed between the part, located in the upper concave cavity, of the upper pipeline and the side wall of the upper concave cavity. By changing the structures of the upper penetrating cavity and the lower penetrating cavity, heat transfer between the upper pipeline and the upper cover plate and between the lower pipeline and the fixing piece is weakened, and meanwhile, a heating source is increased, so that gas condensation is prevented, wafer scrapping is prevented, gas pipeline replacement is avoided, manpower and financial resources are saved, and the production efficiency is improved. And meanwhile, the o