Floating bridge structure and infrared sensing device

A floating bridge structure comprises a substrate, a floating bridge layer and at least one bridge leg. The floating bridge layer is located on the substrate and is substantially parallel to the upper surface of the substrate. The bridge legs straightly extend from the substrate to the floating brid...

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Bibliographische Detailangaben
Hauptverfasser: JIANG GUANGHAO, ZHUANG SHANGYU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A floating bridge structure comprises a substrate, a floating bridge layer and at least one bridge leg. The floating bridge layer is located on the substrate and is substantially parallel to the upper surface of the substrate. The bridge legs straightly extend from the substrate to the floating bridge layer. By means of the design, the effective light absorption area of the infrared sensing device can be increased, the overall sensing capacity of the infrared sensing device can be further improved, and the process convenience can be effectively improved. 一种浮桥结构包括基板、浮桥层以及至少一桥腿。浮桥层位于基板上,且实质上平行于基板的上表面。桥腿由基板笔直地延伸至浮桥层。借由上述设计,可提升红外线感测装置的有效吸光面积,以进一步提升红外线感测装置整体的感测能力,并可有效地提升工艺便利性。