High-efficiency low-pollution plasma source

The invention belongs to the technical field of plasma sources, and particularly relates to a high-efficiency low-pollution plasma source which comprises a cathode, a water-cooled anode and a magnet yoke base which are coaxially arranged, inner magnetic steel arranged at the center of the magnet yoke base, an inner shield which sleeves the inner magnetic steel, and outer magnetic steel and an outer shield which are fixedly mounted above the outer edge of the magnet yoke base, the magnet yoke base is positioned in the cathode; the water-cooled anode is connected with the cathode in an insulating manner; the magnetic force directions of the inner magnetic steel and the outer magnetic steel are opposite; and a discharge power supply A is connected between the cathode and the water-cooling anode. The inner magnetic pole and the outer magnetic pole of the plasma source are located at the suspension potential or different bias voltages are applied to a workpiece or a vacuum chamber respectively, and the potential i