Defect detection method and system

A defect detection method is used for analyzing a plurality of images of a detected plate and a plurality of images of a reference plate, and comprises the following steps: performing a panel calibration program on the images of the detected plate and the reference plate; respectively carrying out a feature point alignment procedure on the calibrated image of the tested plate and the calibrated image of the reference plate; comparing each image of the aligned tested plate with a corresponding image of the reference plate to obtain a difference image; and determining whether a defect exists according to the difference image. 一种缺陷检测方法，针对受测板的多个影像以及参考板的多个影像进行分析，并包含：对受测板的影像与参考板的影像进行面板校准程序；针对已校准的受测板的影像以及参考板的影像分别进行特征点对齐程序；针对已对齐的受测板的每一影像与参考板的对应影像相互比对以获得差异影像；及依据差异影像决定是否存在缺陷。