Preparation method of tungsten-silicon alloy target material

The invention provides a preparation method of a tungsten-silicon alloy target material, which comprises the following steps: (1) taking silicon powder and tungsten powder as raw materials, carrying out vacuum heating on the silicon powder, and then carrying out water quenching treatment; (2) putting the silicon powder subjected to water quenching into a ball milling tank for vacuum ball milling, and then performing vacuum drying; (3) adding the silicon powder subjected to vacuum drying into a mixed solution of sulfuric acid and hydrochloric acid for ultrasonic treatment; then cleaning with water, and then putting into a drying box for vacuum drying; (4) carrying out vacuum ball milling on silicon powder and tungsten powder; (5) carrying out vacuum induction heating treatment on the tungsten-silicon powder; (6) carrying out ball milling treatment on the primarily alloyed tungsten-silicon powder; and (7) the mixed powder is sintered and machined, a carburized layer is removed, and the tungsten-silicon alloy ta