Micro-electro-mechanical system

A micro-electro-mechanical system includes a backplate and a diaphragm. The back plate comprises a plurality of stator elements which are arranged at intervals, gaps are formed among the stator elements, and each stator element comprises a first conductive element; and the diaphragm comprises a plurality of folds corresponding to the plurality of gaps respectively, each fold comprises a groove formed on the surface far away from the backboard, and the fold comprises a second conductive element. The diaphragm moves relative to the back plate in response to the applied pressure, so that the wrinkles move into or out of the corresponding gaps, and the capacitance formed between the first conductive element and the second conductive element is changed. The wrinkles are defined by grooves formed away from the surface of the back plate, which facilitates controlling the flexibility of the diaphragm and reducing the stiffness of the diaphragm. The pleats may form a lower aspect ratio, which allows it to be formed us