Flexible pressure sensor of composite material dielectric layer based on laser-induced graphene

The invention belongs to the field of pressure sensors, and relates to a flexible pressure sensor of a composite material dielectric layer based on laser-induced graphene. Air is introduced to form the composite dielectric layer, and the performance of the device is greatly superior to that of a sensor prepared from a single solid/liquid dielectric layer. And the sensor has two deformable structures, namely the dielectric layer and the electrode, so that the sensitivity and the working range of the sensor are improved from multiple angles. In the same field, on the premise of the same preparation cost, the sensitivity of the sensor is very excellent; on the premise of the same sensitivity, the preparation cost of the sensor is far lower than that of other sensors. The applicability and potential of single device pressure measurement and multi-unit electronic skin tactile sensing are great. 本发明属于压力传感器领域，涉及基于激光诱导石墨烯的复合材料介电层的柔性压力传感器。本发明引入空气构成复合介电层，器件性能大大优于单一固体/液体介电层所制备的传感器。且传感器有介电层和电极本身两部分可形变结构，多角度提升传感器灵敏度及工作范围。