Process for improving adhesive force of coating layer

The invention discloses a process for improving the adhesive force of a coating layer, belongs to the technical field of vapor deposition, and aims to solve the problems that the existing parylene coating layer is low in adhesive force and easy to fall off due to non-uniform adhesion of a coupling a...

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1. Verfasser: PENG JIEZHEN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a process for improving the adhesive force of a coating layer, belongs to the technical field of vapor deposition, and aims to solve the problems that the existing parylene coating layer is low in adhesive force and easy to fall off due to non-uniform adhesion of a coupling agent in the early stage and non-uniform thickness of the coating layer during vapor deposition. Putting the workpiece into a drying oven, and drying and cleaning water vapor adsorbed on the surface of the workpiece; putting the workpiece into an evaporation reaction tank of a coating machine; sealing the reaction tank, vacuumizing to adsorb the silane coupling agent through the sponge, putting the sponge into the reaction tank, and carrying out coupling agent evaporation coating according to the requirements of a coating machine; adding parylene into the reaction tank, and carrying out vapor deposition to coat parylene according to the requirements of a coating machine; deflating the system and taking out the workp