Nanostructure developing device, developing method and application

The invention provides a nanostructure developing device, a developing method and application, and relates to the technical field of photoetching. The nanostructure developing device provided by the invention comprises a liquid container, a liquid small molecule generator, a sample chamber and a waste liquid collecting device which are communicated in sequence, a developing solution or a fixing solution can be stored in the liquid container, the liquid small molecule generator can change liquid from the liquid container into small molecule non-flowing liquid, and the sample chamber is communicated with the waste liquid collecting device. The waste liquid collecting device can recover the small-molecule non-flowing liquid, after the developing solution in the form of the small-molecule non-flowing liquid reaches the surface of the sample, the photoresist in the exposure area can be dissolved in the small-molecule non-flowing liquid, so that the sample is developed, and after the developing is finished, the fix