Preparation method of LTCC substrate

The invention discloses a preparation method of an LTCC (Low Temperature Co-Fired Ceramic) substrate, which is characterized by comprising the following steps of: adding photosensitive resin and an additive into grinding equipment, and grinding to obtain a photosensitive resin premixed solution; gri...

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Bibliographische Detailangaben
Hauptverfasser: SUI SONGLIN, XU XIANBAO, WANG WEIWEI, LI LING, WANG YINGYING, WANG FEI, LI NAN, WANG XIAODONG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a preparation method of an LTCC (Low Temperature Co-Fired Ceramic) substrate, which is characterized by comprising the following steps of: adding photosensitive resin and an additive into grinding equipment, and grinding to obtain a photosensitive resin premixed solution; grinding the photosensitive resin premixed liquid and glass ceramic powder in grinding equipment to obtain glass ceramic slurry; the glass ceramic slurry is prepared into a first-layer green body through 3D printing equipment, after the first-layer green body is cured, a second-layer green body continues to be prepared on the first-layer green body, n layers of green bodies are prepared through repeated superposition, a substrate green body is prepared, the thickness of each layer of green body is 10-100 microns, and the error is 10-15 microns; and sintering the substrate blank body to obtain the substrate. Through the preparation method of the LTCC substrate, the ultrathin LTCC substrate is prepared, and the precisio