Preparation method of LTCC substrate
The invention discloses a preparation method of an LTCC (Low Temperature Co-Fired Ceramic) substrate, which is characterized by comprising the following steps of: adding photosensitive resin and an additive into grinding equipment, and grinding to obtain a photosensitive resin premixed solution; gri...
Gespeichert in:
Hauptverfasser: | , , , , , , , |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The invention discloses a preparation method of an LTCC (Low Temperature Co-Fired Ceramic) substrate, which is characterized by comprising the following steps of: adding photosensitive resin and an additive into grinding equipment, and grinding to obtain a photosensitive resin premixed solution; grinding the photosensitive resin premixed liquid and glass ceramic powder in grinding equipment to obtain glass ceramic slurry; the glass ceramic slurry is prepared into a first-layer green body through 3D printing equipment, after the first-layer green body is cured, a second-layer green body continues to be prepared on the first-layer green body, n layers of green bodies are prepared through repeated superposition, a substrate green body is prepared, the thickness of each layer of green body is 10-100 microns, and the error is 10-15 microns; and sintering the substrate blank body to obtain the substrate. Through the preparation method of the LTCC substrate, the ultrathin LTCC substrate is prepared, and the precisio |
---|