X-ray fluorescence analyzer and method for controlling X-ray fluorescence analyzer

The invention provides an X-ray fluorescence analyzer and a method for controlling the X-ray fluorescence analyzer, which can prevent deterioration and damage of a sample and contamination of the inside of the X-ray fluorescence analyzer even if an abnormality occurs in the X-ray fluorescence analyzer. The X-ray fluorescence analyzer is provided with: a measurement unit including a movement mechanism that moves a sample between a standby position and a measurement position, an X-ray source that irradiates the sample with X-rays once, a detector that detects the intensity of the incident X-ray fluorescence, and a first control unit that controls the movement mechanism and the X-ray source to operate; and an information processing unit that has an analysis unit that analyzes the sample on the basis of the intensity of the fluorescent X-rays measured by the detector, and a second control unit that communicates with the first control unit and controls the measurement unit, the first control unit having a relief m