VCSEL laser and preparation method thereof

The invention provides a VCSEL laser and a preparation method thereof. The VCSEL laser comprises: an epitaxial structure; a seed metal layer formed on the epitaxial structure and electrically connected to the epitaxial structure; the first electrode is formed on the seed metal layer and electrically...

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Bibliographische Detailangaben
Hauptverfasser: TIAN ZHIWEI, WANG CHAOCHENG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a VCSEL laser and a preparation method thereof. The VCSEL laser comprises: an epitaxial structure; a seed metal layer formed on the epitaxial structure and electrically connected to the epitaxial structure; the first electrode is formed on the seed metal layer and electrically connected to the seed metal layer, and the first electrode is provided with a light emitting hole which is formed in the first electrode in a penetrating mode and corresponds to the oxidation open hole; the protective layer is arranged on the periphery of the seed metal layer, and the seed metal layer is isolated from the outside by the protective layer; and the second electrode is electrically connected to the epitaxial structure. Therefore, the protective layer for isolating the seed metal layer from the outside is arranged around the seed metal layer, so that the seed metal layer is effectively prevented from being exposed to cause dissimilation, and the performance stability of the VCSEL is ensured. 本申请提供一种VCS