MEMS resonant electrometer based on 1: 3 frequency ratio nonlinear electrostatic coupling

The invention relates to an MEMS resonant electrometer based on nonlinear electrostatic coupling of the frequency ratio of 1: 3, a high-frequency resonator module and a low-frequency resonator module of the MEMS resonant electrometer are adjacent and are located between two excitation modules, the excitation modules generate excitation to the high-frequency resonance module and the low-frequency resonance module which are electrified with direct current by applying electric signals, and the high-frequency resonance module and the low-frequency resonance module are connected with the high-frequency resonance module and the low-frequency resonance module. The high-frequency resonance module and the low-frequency resonance module form a capacitor through an excited plate, energy is transmitted between the high-frequency resonance module and the low-frequency resonance module through electrostatic force between capacitance polar plates, so that the motion states of the high-frequency resonance module and the low-