Flexible pressure sensor capable of shielding stretching and bending interference and preparation method thereof

The invention belongs to the related technical field of flexible sensors, and discloses a flexible pressure sensor capable of shielding stretching and bending interference and a preparation method thereof. The flexible pressure sensor comprises an upper electrode and a lower electrode, the upper ele...

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Bibliographische Detailangaben
Hauptverfasser: LIU ZIJIE, GUO JIAJIE, HUANG BIN, GUO CHUXUAN, XUE HONGWEI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention belongs to the related technical field of flexible sensors, and discloses a flexible pressure sensor capable of shielding stretching and bending interference and a preparation method thereof. The flexible pressure sensor comprises an upper electrode and a lower electrode, the upper electrode and the lower electrode are oppositely arranged, the opposite surfaces of the upper electrode and the lower electrode are coated with dielectric layers, the opposite surfaces of the lower electrode and the upper electrode are provided with a plurality of convex peaks, and the lower electrode and the upper electrode are bonded with the dielectric layers through the convex peaks; the positions, corresponding to the gaps between the convex peaks, of the upper electrode are provided with wrinkles, and the wrinkles reduce the extrusion trend between the upper electrode and the lower electrode during stretching or bending, so that the influence of stretching or bending on capacitance formed by the upper electrode