Silicon wafer manufacturing device and use method thereof
The invention discloses a silicon wafer manufacturing device and a use method thereof, and relates to the technical field of silicon wafer manufacturing. The device comprises a machine main body, and further comprises a silicon wafer fixing mechanism used for automatically positioning and fixing a s...
Gespeichert in:
Hauptverfasser: | , , , |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The invention discloses a silicon wafer manufacturing device and a use method thereof, and relates to the technical field of silicon wafer manufacturing. The device comprises a machine main body, and further comprises a silicon wafer fixing mechanism used for automatically positioning and fixing a silicon wafer; the silicon wafer fixing mechanism comprises a silicon wafer adsorption mechanism, the silicon wafer adsorption mechanism is used for fixing a silicon wafer, and the silicon wafer adsorption mechanism is provided with a silicon wafer positioning mechanism in a matched manner; the rotating mechanism is used for driving the silicon wafer fixing mechanism to rotate; and the silicon wafer detection mechanism is used for detecting the flatness of the silicon wafer. Through cooperation of all accessories, a silicon wafer can be automatically positioned and adsorbed, the silicon wafer is driven to rotate at a constant speed, the flatness of the side wall of the silicon wafer can be effectively detected in co |
---|