Silicon wafer manufacturing device and use method thereof

The invention discloses a silicon wafer manufacturing device and a use method thereof, and relates to the technical field of silicon wafer manufacturing. The device comprises a machine main body, and further comprises a silicon wafer fixing mechanism used for automatically positioning and fixing a s...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: GUAN JIAHUI, YANG YANG, JI FUHUA, YANG ZHENHUA
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a silicon wafer manufacturing device and a use method thereof, and relates to the technical field of silicon wafer manufacturing. The device comprises a machine main body, and further comprises a silicon wafer fixing mechanism used for automatically positioning and fixing a silicon wafer; the silicon wafer fixing mechanism comprises a silicon wafer adsorption mechanism, the silicon wafer adsorption mechanism is used for fixing a silicon wafer, and the silicon wafer adsorption mechanism is provided with a silicon wafer positioning mechanism in a matched manner; the rotating mechanism is used for driving the silicon wafer fixing mechanism to rotate; and the silicon wafer detection mechanism is used for detecting the flatness of the silicon wafer. Through cooperation of all accessories, a silicon wafer can be automatically positioned and adsorbed, the silicon wafer is driven to rotate at a constant speed, the flatness of the side wall of the silicon wafer can be effectively detected in co