MEMS resonant sensor based on internal resonance frequency locking

The invention relates to an MEMS (Micro Electro Mechanical System) resonant sensor based on internal resonance frequency locking, which comprises a low-frequency resonator module, a high-frequency resonator module, a coupling beam module, a low-frequency excitation module and a high-frequency excitation module, the low-frequency excitation module can generate excitation and detect the movement of the low-frequency resonant beam through the power amplifier; the high-frequency resonator module is connected with the high-frequency excitation module through the high-frequency resonant beam, and the high-frequency excitation module can generate excitation and detect the movement of the high-frequency resonant beam through the power amplifier; and the coupling beam module is connected with the low-frequency resonator module and the high-frequency resonator module. According to the invention, the resonator can carry out measurement in a non-linear region by using the phenomenon of frequency coupling lock losing jump