Front liquid mixing system for semiconductor wet process
The invention discloses a front liquid mixing system for a semiconductor wet process, and particularly relates to the field of semiconductor wet processes, the front liquid mixing system comprises a liquid mixing device main frame, the lower end of the liquid mixing device main frame is provided wit...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a front liquid mixing system for a semiconductor wet process, and particularly relates to the field of semiconductor wet processes, the front liquid mixing system comprises a liquid mixing device main frame, the lower end of the liquid mixing device main frame is provided with an inner liquid bin, the upper end of the inner liquid bin is provided with an arc-shaped plate, the outer end of the arc-shaped plate is provided with an inclined cylinder, and the inner end of the inclined cylinder is provided with an outer liquid bin; a bottom plate is arranged at the upper end of the outer liquid bin, a glue removing bin is arranged at the upper end of the bottom plate, a liquid outlet device is arranged at the inner end of the inner liquid bin, a liquid outlet control motor is arranged at the upper end of the liquid outlet device, a liquid outlet threaded rod is arranged at the lower end of the liquid outlet control motor, and a liquid outlet ceramic hammer is arranged at the outer end of th |
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