System and method for vapor deposition of OLED layer stacks in vertical orientation

System and method for vapor deposition of OLED layer stacks in vertical orientation

A vacuum orientation module for a substrate processing system is described. The module comprises at least a first vacuum orientation chamber comprising: a vacuum chamber; a first transport track within the vacuum chamber, the first transport track having a first support structure and a first drive s...

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Hauptverfasser: ZANG SEBASTIAN GUNTHER, HENRICH JURGEN
Format: Patent
Sprache:chi ; eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator ZANG SEBASTIAN GUNTHER
HENRICH JURGEN
description A vacuum orientation module for a substrate processing system is described. The module comprises at least a first vacuum orientation chamber comprising: a vacuum chamber; a first transport track within the vacuum chamber, the first transport track having a first support structure and a first drive structure and defining a transport direction; an orientation actuator that changes the orientation of the substrate between a non-vertical orientation and a non-horizontal orientation, the vacuum chamber having a first pair of two slit openings, in particular substantially vertical slit openings, at opposite side walls of the vacuum chamber in the transport direction; and a second transport track within the vacuum chamber, the second transport track having a second support structure and a second drive structure extending in the transport direction, the vacuum chamber having a second pair of two slit openings at the opposite sidewalls of the vacuum chamber. 描述了一种用于基板处理系统的真空取向模块。所述模块包括至少第一真空取向腔室，包括：真空腔室；第一运输轨道，所述第一运输轨
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title System and method for vapor deposition of OLED layer stacks in vertical orientation
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